Practice Step 4: Simulation – Critical Dimension Vs Wavelength (3.6) - Lithography Techniques and Innovations
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Step 4: Simulation – Critical Dimension vs Wavelength

Practice - Step 4: Simulation – Critical Dimension vs Wavelength

Learning

Practice Questions

Test your understanding with targeted questions

Question 1 Easy

What does critical dimension (CD) refer to?

💡 Hint: Think about the smallest detail you can make in a circuit.

Question 2 Easy

What is the relationship between wavelength and critical dimension?

💡 Hint: If we got shorter light waves, we can draw smaller things.

4 more questions available

Interactive Quizzes

Quick quizzes to reinforce your learning

Question 1

What does a smaller wavelength in lithography typically allow?

Larger critical dimensions
Smaller critical dimensions
No effect on critical dimensions

💡 Hint: Remember the SLSC principle!

Question 2

True or False: Higher numerical aperture decreases resolution.

True
False

💡 Hint: Think about focusing light.

1 more question available

Challenge Problems

Push your limits with advanced challenges

Challenge 1 Hard

If a new technique could reduce k to 0.3 while maintaining NA at 1.35 and λ at 10 nm, what would be the new critical dimension?

💡 Hint: Use the resolution formula we've been practicing.

Challenge 2 Hard

Discuss the trade-offs between using EUV and traditional photolithography methods. What factors should companies consider?

💡 Hint: Reflect on performance versus price.

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Reference links

Supplementary resources to enhance your learning experience.