8.3.1. Photolithography

Try these first

1. 1.

   What is photolithography used for?

   Hint

   Think about how we prepare materials in electronics.

2. 2.

   What is a photomask?

   Hint

   Consider what we align during exposure.

3. 3.

   What is the primary purpose of photolithography?

   • To fuse materials
   • To define patterns
   • To etch surfaces

   Hint

   Remember, what is the object's purpose in fabricating MEMS?

4. 4.

   True or False: Positive photoresist is where the unexposed areas dissolve during development.

   • True
   • False

   Hint

   What happens to areas based on exposure?

5. 5.

   Consider a scenario where a photomask has several defects. What implications could this have for the resulting microstructures?

   Hint

   Think about the importance of precision in manufacturing.

6. 6.

   How would you design an experiment to test the resolution limits of photolithography?

   Hint

   Consider what variables you could control during the process.