4. MEMS Design and Fabrication Techniques

Try these first

1. 1.

   What does MEMS stand for?

   Hint

   Think about the components involved in MEMS.

2. 2.

   Name one fabrication technique used in MEMS.

   Hint

   Consider the methods we discussed in fabrication.

3. 3.

   What does MEMS stand for?

   • Micro-Electro-Mechanical Systems
   • Minimum-Electrical Micro Systems
   • Mechanical-Electrical Microsystems

   Hint

   Focus on the components involved.

4. 4.

   True or False: ESD protection is unnecessary during MEMS handling.

   • True
   • False

   Hint

   Consider the materials and their susceptibility.

5. 5.

   Design a simple MEMS device that achieves high reliability in a critical application. What factors should be considered in that design?

   Hint

   Think about the end-use environment of your device.

6. 6.

   If you were to enhance manufacturability in your MEMS project, which aspects would you focus on, and how would they impact the final product?

   Hint

   Recall the equation of design meeting the manufacturing capabilities.