Practice Key Processes In Mems Fabrication (8.3) - Materials and Processes in MEMS Fabrication
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Key Processes in MEMS Fabrication

Practice - Key Processes in MEMS Fabrication

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Practice Questions

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Question 1 Easy

What is the first step in photolithography?

💡 Hint: Think about what you need to cover the wafer first.

Question 2 Easy

What does PVD stand for?

💡 Hint: Recall the 'physical' aspect of vaporizing materials.

4 more questions available

Interactive Quizzes

Quick quizzes to reinforce your learning

Question 1

What is the first step in photolithography?

Apply photoresist
Develop photoresist
Expose photoresist

💡 Hint: Consider what needs to be done before any exposure occurs.

Question 2

Dry etching is primarily used because it allows for...

Isotropic material removal
Higher aspect ratio with vertical sidewalls
Slower etching rate

💡 Hint: Think about why we'd need precise shapes in MEMS.

3 more questions available

Challenge Problems

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Challenge 1 Hard

Discuss the complete process of photolithography as applied in a MEMS fabrication scenario, including applications and materials involved.

💡 Hint: Think about each step's role in creating precision in MEMS.

Challenge 2 Hard

Analyze how the choice between wet etching and dry etching might affect manufacturability and performance of MEMS devices.

💡 Hint: Consider the effects of etching types on device geometry.

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