8. Materials and Processes in MEMS Fabrication

Try these first

1. 1.

   What is the primary material used in MEMS fabrication?

   Hint

   Think about common semiconductor materials.

2. 2.

   What is photolithography used for?

   Hint

   Consider how images are transferred in different technologies.

3. 3.

   What is the primary function of photolithography in MEMS fabrication?

   • To etch materials
   • To create patterns
   • To apply coatings

   Hint

   Think about the image transfer process.

4. 4.

   True or False: Silicon nitride is a good dielectric material.

   • True
   • False

   Hint

   Recall the properties of insulating materials.

5. 5.

   How would you approach selecting materials for a new MEMS device intended for biomedical applications?

   Hint

   Think about human contact and long-term stability.

6. 6.

   Analyze the impact of using dry etching versus wet etching on the design flexibility in MEMS.

   Hint

   Reflect on the trade-offs between design complexity and etching methods.