8.2. Materials Used in MEMS Fabrication

Try these first

1. 1.

   Name one form of silicon used in MEMS fabrication.

   Hint

   Think about the most common type of silicon.

2. 2.

   What is the primary role of silicon dioxide in MEMS?

   Hint

   Consider its insulating properties.

3. 3.

   What is the most widely used material in MEMS fabrication?

   • Metals
   • Silicon
   • Polymers

   Hint

   Consider the foundational material for microelectromechanical systems.

4. 4.

   Silicon nitride is primarily known for which of these properties?

   • High electrical conductivity
   • High tensile strength

   Hint

   Think about materials used for durability.

5. 5.

   Design a MEMS device utilizing both silicon and a polymer. Describe the advantages of each material in your design.

   Hint

   Think about what properties each material brings to the design.

6. 6.

   Explain how piezoelectric materials could enhance a MEMS sensor's performance when integrated with silicon.

   Hint

   Consider how converting mechanical stress to voltage impacts sensor capabilities.