8.2.4. Metals (Al, Au, Pt, Cr)

Try these first

1. 1.

   What are the main metals used in MEMS?

   Hint

   Think of precious and common metals in electronics.

2. 2.

   What is the role of electrodes in MEMS?

   Hint

   Consider their role in applying and measuring electrical signals.

3. 3.

   Which of the following metals is NOT commonly used in MEMS?

   • Aluminum
   • Copper
   • Gold
   • Platinum

   Hint

   Focus on the metals mentioned in our discussions.

4. 4.

   True or False: Chromium is primarily used for its electrical conductivity in MEMS.

   • True
   • False

   Hint

   Think about the different roles metals play in MEMS.

5. 5.

   Given that the resistivity of aluminum is lower than that of copper, why might aluminum still be favored in MEMS fabrication over copper?

   Hint

   Consider the trade-off between materials' surface characteristics.

6. 6.

   If a MEMS device requires high-temperature operation, which metal among the discussed ones would be the best choice and why?

   Hint

   Think about the operating environment and the properties of each metal.