8.2.2. Silicon Dioxide (SiO₂)

Try these first

1. 1.

   What is one primary application of Silicon Dioxide in MEMS?

   Hint

   Think about what prevents electrical current flow between parts.

2. 2.

   Is Silicon Dioxide chemically stable?

   Hint

   Consider how it behaves in various chemical environments.

3. 3.

   What is one use of Silicon Dioxide in MEMS?

   • Electrical Isolation
   • Magnetic Conduction
   • Heat Generation

   Hint

   Think about its function to prevent current flow.

4. 4.

   True or False: Silicon Dioxide can act as a sacrificial layer.

   • True
   • False

   Hint

   Consider what happens during the micromachining process.

5. 5.

   Evaluate the significance of Silicon Dioxide in a specific MEMS application, analyzing its properties and roles.

   Hint

   Focus on the multifunctional aspects of SiO₂ in that application.

6. 6.

   Propose a method for synthesizing Silicon Dioxide in a MEMS fabrication scenario and justify your choice of technique.

   Hint

   Think about the advantages of various deposition methods.