8.2.3. Silicon Nitride (Si₃N₄)

Try these first

1. 1.

   List two uses of silicon nitride in MEMS applications.

   Hint

   Think about where protective layers are needed.

2. 2.

   What does high tensile strength mean?

   Hint

   Consider stress and breaking points in materials.

3. 3.

   What is silicon nitride primarily used for in MEMS?

   • As a thermal conductor
   • As a diffusion barrier
   • As a heat sink

   Hint

   Think about protective functions in devices.

4. 4.

   True or False: Silicon nitride is highly sensitive to chemical corrosion.

   • True
   • False

   Hint

   Recall the properties of silicon nitride.

5. 5.

   How would you design a MEMS device in an environment prone to chemical exposure? Discuss the material choices and the role of silicon nitride.

   Hint

   Consider how different materials interact with chemicals.

6. 6.

   Evaluate the significance of using silicon nitride as a structural film in MEMS devices. What potential drawbacks might you consider?

   Hint

   Think about the trade-offs in using strong materials.