4.4. MEMS Fabrication Techniques Overview

Try these first

1. 1.

   What fabrication technique involves the removal of material from a substrate?

   Hint

   Think about which method creates structures by taking away material.

2. 2.

   Name one application for surface micromachining.

   Hint

   What devices use layers built on the surface?

3. 3.

   What is bulk micromachining primarily used for?

   • Joining wafers
   • Material removal
   • Film deposition

   Hint

   Consider the main action involved in this technique.

4. 4.

   True or False: Surface micromachining builds structures by removing material.

   • True
   • False

   Hint

   Think about whether it adds or takes away from the substrate.

5. 5.

   Design a MEMS device that utilizes both bulk micromachining and surface micromachining. Describe the processes involved and why both techniques are necessary.

   Hint

   Think about which components require removal versus which need to be built up.

6. 6.

   Compare and contrast DRIE and LIGA in terms of their applications in MEMS. How would one be preferable over the other?

   Hint

   Consider the nature of the structures you're creating.