Common Mems Sensors (3.2.2) - Sensing, Actuation, and Microfabrication
Students

Academic Programs

AI-powered learning for grades 8-12, aligned with major curricula

Professional

Professional Courses

Industry-relevant training in Business, Technology, and Design

Games

Interactive Games

Fun games to boost memory, math, typing, and English skills

Common MEMS Sensors

Common MEMS Sensors

Enroll to start learning

You’ve not yet enrolled in this course. Please enroll for free to listen to audio lessons, classroom podcasts and take practice test.

Practice

Interactive Audio Lesson

Listen to a student-teacher conversation explaining the topic in a relatable way.

Introduction to MEMS Sensors

🔒 Unlock Audio Lesson

Sign up and enroll to listen to this audio lesson

0:00
--:--
Teacher
Teacher Instructor

Welcome everyone! Today, we will explore MEMS sensors and understand their critical roles. Can anyone tell me what MEMS stands for?

Student 1
Student 1

Microelectromechanical Systems!

Teacher
Teacher Instructor

Exactly! MEMS sensors detect environmental changes and convert them into electrical signals. What are some types of physical quantities they measure?

Student 2
Student 2

Like pressure and temperature?

Student 3
Student 3

Also, biological signals!

Teacher
Teacher Instructor

Great points! Remember, we can use the mnemonic 'MTPB' for Mechanical, Thermal, Pressure, and Biological parameters. Let's dive deeper into specific sensor types.

Types of MEMS Sensors

🔒 Unlock Audio Lesson

Sign up and enroll to listen to this audio lesson

0:00
--:--
Teacher
Teacher Instructor

Now, let’s look at some common MEMS sensors. What do you think an accelerometer measures?

Student 4
Student 4

Acceleration forces in different directions!

Teacher
Teacher Instructor

Exactly! They are crucial in devices like smartphones for orientation detection. What about gyroscopes?

Student 1
Student 1

They measure angular velocity, right?

Teacher
Teacher Instructor

That’s correct! How about pressure sensors?

Student 2
Student 2

They monitor fluid or gas pressure!

Teacher
Teacher Instructor

Well done! These sensors have varied applications from weather measurement to medical devices.

Working Principles of MEMS Sensors

🔒 Unlock Audio Lesson

Sign up and enroll to listen to this audio lesson

0:00
--:--
Teacher
Teacher Instructor

Let’s discuss the working principles behind MEMS sensors. Who can explain capacitive sensing?

Student 3
Student 3

It involves changes in capacitance due to physical displacement?

Teacher
Teacher Instructor

Exactly! Now, what about piezoelectric sensing?

Student 4
Student 4

That uses materials that generate an electrical charge when stressed!

Teacher
Teacher Instructor

Correct! And piezoresistive sensing relies on changes in resistance. It's important to remember these principles as they enhance our understanding of sensor design.

Applications of MEMS Sensors

🔒 Unlock Audio Lesson

Sign up and enroll to listen to this audio lesson

0:00
--:--
Teacher
Teacher Instructor

MEMS sensors have a wide range of applications. Can anyone provide examples of where we find these sensors in use?

Student 2
Student 2

In smartphones for motion detection!

Student 1
Student 1

And in medical devices for monitoring health!

Teacher
Teacher Instructor

Right! They are also used in automotive systems for preventively monitoring vehicle dynamics. Remember: MEMS sensors are everywhere!

Review of Key Concepts

🔒 Unlock Audio Lesson

Sign up and enroll to listen to this audio lesson

0:00
--:--
Teacher
Teacher Instructor

Let's wrap up what we've learned today. Can anyone summarize the importance of MEMS sensors?

Student 4
Student 4

They detect environmental changes and help in various applications!

Teacher
Teacher Instructor

Exactly! And what types did we discuss?

Student 3
Student 3

Accelerometers, gyroscopes, pressure sensors, microphones, and biosensors!

Teacher
Teacher Instructor

Well done! Remember the working principles too, like capacitive and piezoelectric sensing. These concepts are foundational for understanding MEMS technology.

Introduction & Overview

Read summaries of the section's main ideas at different levels of detail.

Quick Overview

This section discusses the various types of MEMS sensors, their working principles, and applications in detecting physical, thermal, chemical, and biological phenomena.

Standard

Common MEMS sensors are essential components that detect and convert environmental changes into electrical signals. Key examples include accelerometers, gyroscopes, pressure sensors, microphones, and biosensors. Each type has unique working principles such as capacitive, piezoelectric, and thermal sensing, making them suitable for different applications in various fields.

Detailed

Common MEMS Sensors

MEMS sensors play a crucial role in interacting with the environment by assessing various physical phenomena. They convert these phenomena into electrical signals that can be processed for practical applications. The key categories of physical quantities measurable by MEMS include mechanical properties (like acceleration and pressure), thermal properties (like temperature), chemical properties (like gas concentrations), and biological characteristics (like biomarkers).

Types of MEMS Sensors

  • Accelerometers: Measure changes in velocity and are often used in smartphones for orientation detection.
  • Gyroscopes: Used to measure angular velocity, playing a crucial role in navigation systems.
  • Pressure Sensors: Monitor pressure changes in gases or liquids and are used widely in weather stations and industrial applications.
  • Microphones: Convert sound waves to electrical signals, essential in audio applications, from smartphones to voice assistants.
  • Biosensors: Detect specific biological molecules or activities, increasingly important in medical diagnostic applications.

Working Principles of MEMS Sensors

The functioning of these sensors varies based on their technologies:
- Capacitive Sensing: Changes in capacitance due to physical displacement, ideal for measuring displacement or pressure.
- Piezoelectric Sensing: Utilizes materials that generate an electrical charge in response to mechanical stress, often used in accelerometers.
- Piezoresistive Sensing: Changes in resistance upon deformation, commonly used in pressure sensors.
- Thermal Sensing: Based on temperature changes affecting resistive or capacitive properties.

Understanding these sensors is pivotal for applications in consumer electronics, automotive systems, medical devices, and industrial monitoring.

Youtube Videos

What is a MEMS (Micro-Electromechanical System)?
What is a MEMS (Micro-Electromechanical System)?
What are Micro electromechanical systems?  || MEMS
What are Micro electromechanical systems? || MEMS
MEMS Fabrication Techniques
MEMS Fabrication Techniques

Audio Book

Dive deep into the subject with an immersive audiobook experience.

Accelerometers

Chapter 1 of 5

🔒 Unlock Audio Chapter

Sign up and enroll to access the full audio experience

0:00
--:--

Chapter Content

Accelerometers: Measure acceleration forces in multiple axes

Detailed Explanation

An accelerometer is a device that measures the acceleration, or the rate of change of velocity, of an object. They can measure force in multiple axes, which means they can determine how fast something is speeding up or slowing down in different directions. This capability is essential for applications such as smartphones that detect orientation or fitness trackers that count steps.

Examples & Analogies

Think of an accelerometer like a passenger in a car. If the driver speeds up quickly, the passenger feels pushed back into the seat; if the car suddenly slows down, they feel a forward push. The accelerometer senses these changes in movement just like the passenger feels.

Gyroscopes

Chapter 2 of 5

🔒 Unlock Audio Chapter

Sign up and enroll to access the full audio experience

0:00
--:--

Chapter Content

Gyroscopes: Measure angular velocity

Detailed Explanation

Gyroscopes measure angular velocity, which is how fast an object is rotating around a specific axis. This measuring capability is particularly used in navigation systems of airplanes, spacecraft, and even smartphones to help maintain orientation and direction when movement occurs.

Examples & Analogies

Imagine a spinning top. As long as it spins, it remains upright. If you shove it, it begins to tilt, but it still tries to maintain its original upright position. Gyroscopes operate similarly by resisting changes in their orientation, helping devices keep their balance and direction.

Pressure Sensors

Chapter 3 of 5

🔒 Unlock Audio Chapter

Sign up and enroll to access the full audio experience

0:00
--:--

Chapter Content

Pressure Sensors: Monitor air, fluid, or gas pressure

Detailed Explanation

Pressure sensors are devices that measure the pressure of gases or liquids. These sensors can be used to monitor various environmental conditions, such as weather changes or fluid levels in tanks. They convert the pressure readings into an electrical signal that can be processed by other systems.

Examples & Analogies

Think of a pressure sensor like a balloon. When you blow air into a balloon, it expands until it reaches a certain pressure. If that pressure increases too much, the balloon could pop. Pressure sensors measure this 'inflation' of the air, helping to keep systems safe by alerting when pressure is too high or too low.

Microphones

Chapter 4 of 5

🔒 Unlock Audio Chapter

Sign up and enroll to access the full audio experience

0:00
--:--

Chapter Content

Microphones: Convert sound waves into electrical signals

Detailed Explanation

Microphones in MEMS convert sound waves (which are vibrations in the air) into electrical signals. This conversion allows electronic devices to capture sound for various applications, such as voice recognition, music recording, and telecommunication.

Examples & Analogies

Consider a microphone like a person's ear. Just as our ears pick up sound waves and convert them into signals the brain can interpret, MEMS microphones convert those same sound waves into electrical signals that devices can understand.

Biosensors

Chapter 5 of 5

🔒 Unlock Audio Chapter

Sign up and enroll to access the full audio experience

0:00
--:--

Chapter Content

Biosensors: Detect specific biological molecules or cells

Detailed Explanation

Biosensors are specialized sensors that detect biological molecules or cells, allowing for the diagnosis of medical conditions or monitoring of health statuses. They operate by detecting specific interactions between biological elements and sensing materials, producing recognizable signals.

Examples & Analogies

Think of a biosensor like a key in a lock. Just as a key is designed to fit perfectly into a lock, biosensors are designed to identify and interact with specific biological molecules. For instance, a glucose biosensor for diabetics only reacts with glucose, providing crucial information about a person's blood sugar levels.

Key Concepts

  • MEMS Sensors: Devices transforming environmental changes to electrical signals.

  • Accelerometers: Measure acceleration in one or more axes.

  • Gyroscopes: Measure rotational motion.

  • Pressure Sensors: Monitor air and fluid pressure.

  • Working Principles: Capacitive, piezoelectric, and thermal sensing technologies.

Examples & Applications

Accelerometers are used in smartphones for screen rotation.

Gyroscopes are integral in drones for stabilization and orientation.

Pressure sensors in tire pressure monitoring systems.

Memory Aids

Interactive tools to help you remember key concepts

🎵

Rhymes

MEMS sensors find their role, detection's their ultimate goal!

📖

Stories

Imagine a tiny robot that can sense its environment like a human. It knows when to stop because the pressure sensor tells it when it’s too close to an object, while an accelerometer helps it understand when to move forward or rotate.

🧠

Memory Tools

Remember 'MAP' for Mechanical, Acoustic, and Pressure sensors in MEMS.

🎯

Acronyms

CAP for Capacitive, Acoustic, and Piezoelectric sensing.

Flash Cards

Glossary

MEMS (Microelectromechanical Systems)

A technology used to create tiny integrated devices or systems that combine mechanical and electrical components.

Accelerometer

A MEMS sensor that measures acceleration forces in one or more directions.

Gyroscope

A device that measures or maintains orientation based on the principles of angular momentum.

Pressure Sensor

A sensor that measures the pressure of gases or liquids.

Capacitive Sensing

A technology that detects changes in capacitance to measure displacement, pressure, or other physical parameters.

Piezoelectric Sensing

A technology that generates an electrical charge in response to mechanical stress.

Biosensor

A device that detects biological molecules or cells.

Reference links

Supplementary resources to enhance your learning experience.