3. Introduction to Key Concepts: Sensing, Actuation, and Microfabrication

Try these first

1. 1.

   What does sensing in MEMS refer to?

   Hint

   Think about how devices perceive their surroundings.

2. 2.

   Name a common type of MEMS sensor.

   Hint

   These sensors help with measuring motion.

3. 3.

   What does a MEMS sensor do?

   • Detects sound
   • Senses environmental changes
   • Creates motion

   Hint

   Focus on what sensing involves.

4. 4.

   True or False: Electrostatic actuation consumes a lot of power.

   • True
   • False

   Hint

   Consider the advantages of electrostatic mechanisms.

5. 5.

   Design a MEMS device that uses an accelerometer to control a microvalve in a fluid delivery system. What considerations would you take into account?

   Hint

   Think about the interaction between sensing and actuation.

6. 6.

   Analyze the advantages and challenges of integrating MEMS sensors and actuators in a single device.

   Hint

   Consider both sides of the integration’s impact on performance.