3.4.1. Key Microfabrication Processes

Try these first

1. 1.

   What is photolithography used for?

   Hint

   Think about patterns and how they are applied.

2. 2.

   Name one type of etching.

   Hint

   Recall the difference between liquid and gas methods.

3. 3.

   What does photolithography rely on?

   • Electric currents
   • Light-sensitive materials
   • Chemical reactions

   Hint

   Focus on the materials involved in creating patterns.

4. 4.

   True or False: Dry etching is primarily done with liquid chemicals.

   • True
   • False

   Hint

   Consider the phase difference in etching methods.

5. 5.

   Design a MEMS device using photolithography, etching, and deposition techniques. Outline the steps you would take.

   Hint

   Think about the sequential process and how each step interacts.

6. 6.

   Discuss how the integration of doping and bonding affects the overall performance of a MEMS device.

   Hint

   Consider how materials and their properties work together.