3.4.2. Materials Commonly Used in MEMS Fabrication

Try these first

1. 1.

   What are the two primary types of silicon used in MEMS?

   Hint

   Look for the types mentioned regarding their structures.

2. 2.

   Name a common polymer used in MEMS.

   Hint

   Think about the flexible materials often mentioned.

3. 3.

   What type of silicon is characterized by a single crystal structure?

   • Monocrystalline
   • Polysilicon
   • Both

   Hint

   Think about the structural arrangement of the crystals.

4. 4.

   True or False: Silicon dioxide can be used as an insulating layer in MEMS.

   • True
   • False

   Hint

   Consider the role of insulators in electronic devices.

5. 5.

   Given a MEMS device that requires high sensitivity in a biological environment, discuss the selection of materials and justify your choices.

   Hint

   Think about the requirements the device must meet and the environment it will be used in.

6. 6.

   Evaluate the trade-offs between using metals and polymers in MEMS with respect to reliability and performance.

   Hint

   Consider both mechanical properties and the environments the devices will operate.