Practice Microfabrication In Mems (3.4) - Sensing, Actuation, and Microfabrication
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Microfabrication in MEMS

Practice - Microfabrication in MEMS

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Learning

Practice Questions

Test your understanding with targeted questions

Question 1 Easy

What does photolithography do?

💡 Hint: Think light and pattern creation.

Question 2 Easy

What type of etching uses liquid chemicals?

💡 Hint: Focus on the medium used in this process.

4 more questions available

Interactive Quizzes

Quick quizzes to reinforce your learning

Question 1

What is the purpose of photolithography in MEMS?

To enhance electrical properties
To transfer patterns onto a substrate
To remove material

💡 Hint: Remember the primary functionality of photolithography.

Question 2

True or False: Doping increases silicon's electrical resistance.

True
False

💡 Hint: Think about how doping modifies silicon's electrical properties.

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Challenge Problems

Push your limits with advanced challenges

Challenge 1 Hard

Design a microfabrication process for a new MEMS actuator, incorporating at least three different techniques discussed in class.

💡 Hint: Think about how each process contributes to achieving a functional device.

Challenge 2 Hard

Evaluate the impact of material choice in the microfabrication of MEMS devices on their performance characteristics.

💡 Hint: Consider the properties of materials used in the fabrication process.

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Reference links

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