3.4. Microfabrication in MEMS

Try these first

1. 1.

   What does photolithography do?

   Hint

   Think light and pattern creation.

2. 2.

   What type of etching uses liquid chemicals?

   Hint

   Focus on the medium used in this process.

3. 3.

   What is the purpose of photolithography in MEMS?

   • To enhance electrical properties
   • To transfer patterns onto a substrate
   • To remove material

   Hint

   Remember the primary functionality of photolithography.

4. 4.

   True or False: Doping increases silicon's electrical resistance.

   • True
   • False

   Hint

   Think about how doping modifies silicon's electrical properties.

5. 5.

   Design a microfabrication process for a new MEMS actuator, incorporating at least three different techniques discussed in class.

   Hint

   Think about how each process contributes to achieving a functional device.

6. 6.

   Evaluate the impact of material choice in the microfabrication of MEMS devices on their performance characteristics.

   Hint

   Consider the properties of materials used in the fabrication process.