7.2.3 - Limitations
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Practice Questions
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What are resolution limitations?
💡 Hint: Think about the physical properties that determine how small patterns can be.
Why is overlay accuracy important?
💡 Hint: Consider the consequences of misalignment in a layered structure.
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Interactive Quizzes
Quick quizzes to reinforce your learning
What do resolution limitations impact in nanolithography?
💡 Hint: Think about how physical constraints limit our abilities.
True or False: Overlay accuracy is critical only for the first layer in a multi-layer device.
💡 Hint: Consider the nature of multi-layer devices.
2 more questions available
Challenge Problems
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Design a lithography process that addresses both resolution limitations and defect control for a new microchip. Describe the techniques and materials you would choose.
💡 Hint: Think of how the wavelength used affects resolution.
Critically analyze how material compatibility decisions can impact production costs in a nanofabrication facility.
💡 Hint: Reflect on the implications of material interactions.
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