Practice Limitations (8.4.3) - Lithography and Etching Processes Specific to Compound Semiconductors
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Limitations

Practice - Limitations

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Practice Questions

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Question 1 Easy

What does etch damage refer to?

💡 Hint: Think about what happens to surfaces during etching.

Question 2 Easy

What is selectivity in the context of etching?

💡 Hint: Consider the goal during a careful etch process.

4 more questions available

Interactive Quizzes

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Question 1

What is etch damage?

A type of mask
Surface defects from etching
A plasma technique

💡 Hint: Think about the outcome of the etching process.

Question 2

True or False: Mask erosion doesn't affect the accuracy of the etching pattern.

True
False

💡 Hint: Consider the role of a mask.

1 more question available

Challenge Problems

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Challenge 1 Hard

Propose methods to reduce etch damage in semiconductor devices during fabrication processes, considering both chemical and physical aspects.

💡 Hint: Consider what aspects make etching processes damaging.

Challenge 2 Hard

Evaluate how improved masking materials can mitigate issues of mask erosion during the etching of complex semiconductor structures.

💡 Hint: Think about the effectiveness of different materials.

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