5.4.1. Techniques Used

Try these first

1. 1.

   What does HARMS stand for?

   Hint

   Think about height vs. width.

2. 2.

   Name one application of LIGA.

   Hint

   It's used in biotechnology.

3. 3.

   What does HARMS stand for?

   • High-Aspect-Ratio Measurement Systems
   • High-Aspect-Ratio Micromachining
   • High-Application Ratio Micromachining

   Hint

   Consider the height-to-width relationship.

4. 4.

   True or False? LIGA process includes electroplating.

   • True
   • False

   Hint

   Recall LIGA's components.

5. 5.

   Design a MEMS-based sensor that requires high-aspect-ratio structures. Describe the materials and fabrication methods you would select.

   Hint

   Consider what features are essential for the sensor's function.

6. 6.

   Evaluate the economic implications of choosing DRIE for a new MEMS product prototype. What factors will you consider?

   Hint

   Think about the trade-offs between investment and performance.