9.3.3. Packaging and Interconnects

Try these first

1. 1.

   What is the purpose of hermetic sealing in MEMS packaging?

   Hint

   Think about what keeps devices dry.

2. 2.

   Name one technique used for interconnecting MEMS devices.

   Hint

   Consider standard electrical connection methods.

3. 3.

   What is the main role of packaging in MEMS?

   • To allow for digital processing
   • To protect the MEMS device
   • To provide power

   Hint

   Consider what protects electronics in general.

4. 4.

   True or False: Thermal management is not important for MEMS devices.

   • True
   • False

   Hint

   Think about overheating methods.

5. 5.

   Design a MEMS packaging concept for a high-precision sensor used in a drone. Consider factors such as protection, thermal management, and interconnect techniques.

   Hint

   Think about what conditions a drone might face that could harm a sensor.

6. 6.

   Evaluate the impact of poor hermetic sealing on the functionality of a MEMS accelerometer. Consider how this might affect its applications.

   Hint

   Consider specific environments where moisture could be a problem.