5.3.2. Typical Materials

Try these first

1. 1.

   What is a common structural layer used in surface micromachining?

   Hint

   Think about materials with conductive properties.

2. 2.

   Name a material used as a sacrificial layer.

   Hint

   This is a common material used in front-end lithography.

3. 3.

   Which of the following is a common structural layer material?

   • Aluminum
   • Polysilicon
   • Copper
   • Gold

   Hint

   It's an allotrope of silicon that is critical for electronic applications.

4. 4.

   True or False: Silicon Nitride cannot be used as a structural material in MEMS.

   • True
   • False

   Hint

   Consider its advantages in flexible applications.

5. 5.

   Design a simple MEMS device using polysilicon and silicon nitride. Discuss the choice of materials and their physical properties.

   Hint

   Discuss the typical forces the device will encounter.

6. 6.

   Evaluate the impact of using photoresist versus silicon dioxide as sacrificial layers in a MEMS process.

   Hint

   Consider applications that may require specific material properties.