5.3.4. Applications

Try these first

1. 1.

   What is MEMS?

   Hint

   Think about what happens when micro and electronics combine.

2. 2.

   Name one application of surface micromachining.

   Hint

   Think about moving parts in small devices.

3. 3.

   What is a common application of bulk micromachining?

   • Micro mirrors
   • Pressure sensors
   • Flexible sensors

   Hint

   Think about how bulk techniques work with structural components.

4. 4.

   Surface micromachining is primarily used for creating layered structures. True or False?

   • True
   • False

   Hint

   Remember the nature of how surface work differs from bulk.

5. 5.

   Design a simple MEMS sensor system using at least three distinct fabrication techniques covered in this section.

   Hint

   Think about how these techniques can work together to create a functional device.

6. 6.

   Evaluate the limitations of using soft lithography compared to traditional micromachining methods.

   Hint

   Consider what each method can and cannot achieve in terms of structure and application.