5.2.2. Etching Techniques

Try these first

1. 1.

   What are the two main types of etching techniques discussed?

   Hint

   Think about the processes that involve liquids and gases.

2. 2.

   Which etching technique typically provides more precision?

   Hint

   Consider which method uses plasma rather than chemicals.

3. 3.

   What does wet etching primarily use to remove material?

   • Plasma
   • Chemical solutions
   • Laser

   Hint

   Think about the nature of the etching solution.

4. 4.

   True or False: Dry etching allows for more complex structures than wet etching.

   • True
   • False

   Hint

   Consider the levels of detail achievable with each method.

5. 5.

   Design a MEMS device that could utilize both wet and dry etching techniques and explain your reasoning.

   Hint

   Consider what parts of the device need precision versus those needing simple shapes.

6. 6.

   Critique the advantages of using dry etching for an accelerometer fabricating process compared to wet etching, considering material properties.

   Hint

   Examine how each technique affects the properties of the final device.