5.2.1. Process Features

Try these first

1. 1.

   What is bulk micromachining?

   Hint

   Think about the materials used in MEMS.

2. 2.

   Name a structure that can be formed using bulk micromachining.

   Hint

   Consider the applications for sensors.

3. 3.

   What is the primary purpose of bulk micromachining?

   • To combine materials
   • To remove material
   • To add layers

   Hint

   Think about the actions performed in this process.

4. 4.

   True or False: Wet etching produces vertical sidewalls.

   • True
   • False

   Hint

   Consider the type of etching and its results.

5. 5.

   Propose a design for a pressure sensor using both wet and dry etching techniques. Outline the steps you would take and the materials you would choose.

   Hint

   Consider how each etching technique contributes to the sensor's performance.

6. 6.

   Explain how the characteristics of anisotropic etching affect the performance of MEMS devices.

   Hint

   Think about the physical properties of materials shaping the performance of MEMS devices.