5.3.1. Process Features

Try these first

1. 1.

   What is surface micromachining?

   Hint

   Focus on the construction location of microstructures.

2. 2.

   Name a common structural material used in surface micromachining.

   Hint

   Think about materials used for creating layers.

3. 3.

   What is the primary function of sacrificial layers in surface micromachining?

   Hint

   Think about their role in the final structure.

4. 4.

   Which method is often used for layer deposition in surface micromachining?

   • LPCVD
   • MOCVD
   • Sputtering

   Hint

   Remember the specific technique frequently mentioned.

5. 5.

   Design a simple microstructure ideal for surface micromachining. Discuss the choice of materials, process steps, and potential applications of your designed structure.

   Hint

   Consider the features that allow it to excel in MEMS applications.

6. 6.

   Evaluate the trade-offs between using dry etching versus wet etching in a hypothetical surface micromachining project.

   Hint

   Think about precision vs cost in the context of project requirements.