5.3. Surface Micromachining

Try these first

1. 1.

   What is surface micromachining?

   Hint

   Think about how it differs from bulk micromachining.

2. 2.

   Name a material used as a structural layer in surface micromachining.

   Hint

   Consider what materials provide strength to microstructures.

3. 3.

   What technique does surface micromachining primarily use?

   • Layering
   • Etching
   • Casting

   Hint

   Recall the method of building structures.

4. 4.

   True or False: Sacrificial layers are meant to be permanent.

   • True
   • False

   Hint

   Think about the purpose of sacrificial layers.

5. 5.

   Design a micro device that would benefit from surface micromachining, including technical specifications for each layer in your design.

   Hint

   Think about functionality and how layers interact.

6. 6.

   Evaluate the impact of material choice in surface micromachining processes, proposing alternatives and justifications.

   Hint

   Consider factors like strength, flexibility, and fabrication ease.