1.4. Fabrication Techniques

Try these first

1. 1.

   What does bulk micromachining primarily create?

   Hint

   Think about what material is removed from the substrate.

2. 2.

   What is the main advantage of surface micromachining?

   Hint

   Consider how structures are built.

3. 3.

   What is a primary goal of bulk micromachining?

   • To layer materials
   • To remove material
   • To bond wafers

   Hint

   Think about what the process physically does to the substrate.

4. 4.

   Surface micromachining builds structures layer by layer.

   • True
   • False

   Hint

   Recalling the method's definition might help.

5. 5.

   Analyze the potential limitations of each fabrication technique discussed in this section and propose improvements.

   Hint

   Focus on current challenges and innovative solutions.

6. 6.

   Evaluate the impact these fabrication techniques have on the overall performance of MEMS devices.

   Hint

   Think about how the choice of technique relates to device specifications and user needs.