1. Introduction to MEMS and Its Applications
Microelectromechanical Systems (MEMS) integrate mechanical elements and electronics on a silicon substrate, transforming various industries through miniaturization and smart functionality. The chapter explores MEMS components, fabrication techniques, applications, advantages, challenges, and recent trends, highlighting their essential role in modern technology.
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What we have learnt
- MEMS represent a convergence of mechanical and electronic systems at a microscale.
- Key components of MEMS include sensors, actuators, and microstructures.
- MEMS technology is widely applied in automotive, consumer electronics, biomedical fields, aerospace, and industrial automation.
Key Concepts
- -- MEMS (Microelectromechanical Systems)
- Miniature devices that combine mechanical and electronic functions, capable of sensing, controlling, and actuating on the microscale.
- -- Actuators
- Components within MEMS that produce motion or force, such as microvalves and optical switches.
- -- Fabrication Techniques
- Methods used in MEMS production, including bulk micromachining, surface micromachining, and LIGA.
- -- Applications of MEMS
- Utilizations of MEMS in various sectors—including automotive, consumer electronics, medicine, aerospace, and industrial systems.
- -- Challenges of MEMS Technology
- Issues related to MEMS include packaging concerns, environmental sensitivity, mechanical wear, and complex manufacturing processes.
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