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Microfabrication involves creating miniature structures on semiconductor materials through techniques such as lithography, etching, and deposition. The processes leverage silicon as a primary material, though compound semiconductors are employed for specific applications. The importance of a cleanroom environment and precision tools is underscored to ensure defect-free manufacturing.
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Term: Microfabrication
Definition: A process used to create microstructures on semiconductor materials using techniques like lithography, etching, and deposition.
Term: Lithography
Definition: A method for transferring patterns onto a substrate using light, which can be in various forms including optical and electron beam.
Term: Etching
Definition: The process of selectively removing material from a substrate to create patterns, involved in both wet and dry techniques.
Term: Deposition
Definition: The technique used to add thin layers of materials onto a substrate, which can be conducted through methods like PVD and CVD.
Term: Cleanroom
Definition: A controlled environment with strict airborne particle limits designed to enhance the manufacturing process of semiconductors.