1. Understand the Basic Principles of Microfabrication
Microfabrication involves creating miniature structures on semiconductor materials through techniques such as lithography, etching, and deposition. The processes leverage silicon as a primary material, though compound semiconductors are employed for specific applications. The importance of a cleanroom environment and precision tools is underscored to ensure defect-free manufacturing.
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Sections
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What we have learnt
- Microfabrication utilizes lithography, etching, and deposition to fabricate micro/nanoscale devices.
- Silicon is the leading semiconductor due to its favorable electrical properties.
- Cleanroom standards are crucial for minimizing defects in semiconductor manufacturing.
Key Concepts
- -- Microfabrication
- A process used to create microstructures on semiconductor materials using techniques like lithography, etching, and deposition.
- -- Lithography
- A method for transferring patterns onto a substrate using light, which can be in various forms including optical and electron beam.
- -- Etching
- The process of selectively removing material from a substrate to create patterns, involved in both wet and dry techniques.
- -- Deposition
- The technique used to add thin layers of materials onto a substrate, which can be conducted through methods like PVD and CVD.
- -- Cleanroom
- A controlled environment with strict airborne particle limits designed to enhance the manufacturing process of semiconductors.
Additional Learning Materials
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