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Practice Questions
Test your understanding with targeted questions related to the topic.
Question 1
Easy
What is the purpose of etching in microfabrication?
💡 Hint: Think about pattern creation.
Question 2
Easy
Name one gas used in the Deep RIE process.
💡 Hint: It's a sulfur compound.
Practice 4 more questions and get performance evaluation
Interactive Quizzes
Engage in quick quizzes to reinforce what you've learned and check your comprehension.
Question 1
What is the Bosch process primarily used for?
- Selective deposition
- Deep etching
- Thin film growth
💡 Hint: Focus on its function.
Question 2
True or False: Selectivity is the measure of the etch rate of the film compared to the etch rate of the mask.
- True
- False
💡 Hint: Think about how we evaluate etching efficiency.
Solve 2 more questions and get performance evaluation
Challenge Problems
Push your limits with challenges.
Question 1
If a certain Deep RIE process has an etch rate of 70 nm/min for a silicon film and 14 nm/min for the mask, calculate the selectivity. What does this imply about the etching effectiveness?
💡 Hint: Recap the definition of selectivity.
Question 2
Discuss the impact of enhancing selectivity in the Bosch process. How might process parameters need to be adjusted in order to achieve this goal?
💡 Hint: Consider variables affecting etching gases.
Challenge and get performance evaluation