Practice Step 2: Etching Equipment Overview - 4.4 | 4. Etching and Deposition Processes | Advanced Semiconductor Manufacturing
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Practice Questions

Test your understanding with targeted questions related to the topic.

Question 1

Easy

What is the purpose of an asher in etching processes?

πŸ’‘ Hint: Think about post-etching cleaning.

Question 2

Easy

Name two key components of a plasma etching system.

πŸ’‘ Hint: They're essential for etching to occur.

Practice 4 more questions and get performance evaluation

Interactive Quizzes

Engage in quick quizzes to reinforce what you've learned and check your comprehension.

Question 1

What is the main purpose of a RIE system?

  • To etch materials in a vacuum
  • To remove photoresist
  • For isotropic material removal

πŸ’‘ Hint: Consider what RIE stands for.

Question 2

True or False: ICP etchers are used for shallow etching.

  • True
  • False

πŸ’‘ Hint: Think about the benefits of higher plasma density.

Solve 1 more question and get performance evaluation

Challenge Problems

Push your limits with challenges.

Question 1

Evaluate the efficiency of combining different etching methods. Why might a semiconductor manufacturer choose to use both wet benches and dry etching techniques together?

πŸ’‘ Hint: Think about how each method complements the other.

Question 2

Design an experiment to test the efficacy of an ICP etcher versus a RIE system for etching a specific material. What parameters would you control?

πŸ’‘ Hint: Consider all factors affecting etching performance.

Challenge and get performance evaluation