5. Fabrication Techniques – Bulk Micromachining, Surface Micromachining, and More

Try these first

1. 1.

   What does MEMS stand for?

   Hint

   Think about the components involved.

2. 2.

   Name one advantage of surface micromachining.

   Hint

   Consider how layers contribute to complexity.

3. 3.

   What is the main process used in bulk micromachining?

   • Adding materials
   • Removing materials
   • Joining materials

   Hint

   Think about what bulk means in this context.

4. 4.

   True or False: Surface micromachining can create movable parts.

   • True
   • False

   Hint

   Consider the concept of layers in this technique.

5. 5.

   You are tasked with designing a MEMS device that involves both an actuator and a sensor. Considering the fabrication processes we've discussed, which techniques would you choose and why?

   Hint

   Think about the requirements of each component and their interactions.

6. 6.

   Analyze how the wafer bonding method could impact the final performance of a MEMS device used in a medical application.

   Hint

   Consider the importance of integrity in medical devices.