8.3.2. Deposition Techniques

Try these first

1. 1.

   What does PVD stand for?

   Hint

   Think about layers being deposited physically.

2. 2.

   Name one common material used in spin coating.

   Hint

   It’s a liquid that becomes solid after exposure.

3. 3.

   What is the primary function of PVD?

   • To deposit material using chemical reactions
   • To apply thin layers of substances using physical means
   • To remove material from surfaces

   Hint

   Think about the method of deposition.

4. 4.

   True or False: Spin Coating can be used to apply thick layers of materials effectively.

   • True
   • False

   Hint

   Consider the nature of the spin and distribution.

5. 5.

   Given the properties of various materials, design an experiment to choose between CVD and PVD for a specific MEMS application.

   Hint

   Consider temperature, quality, and the type of material.

6. 6.

   Evaluate the operational conditions for Spin Coating and their effect on layer thickness. Discuss implications for MEMS applications.

   Hint

   Relate speed to thickness to understand the impact.