8.2.5. Polymers (SU-8, PDMS, Parylene)

Try these first

1. 1.

   What is PDMS known for in MEMS fabrication?

   Hint

   Think about medical applications.

2. 2.

   Name one application of SU-8.

   Hint

   Consider what it is commonly used for in manufacturing.

3. 3.

   What is a primary use of PDMS in MEMS applications?

   • Structural components
   • Microfluidic channels
   • Electrical interconnects

   Hint

   Think about its physical properties.

4. 4.

   Parylene is known for its:

   • True
   • False

   Hint

   Consider what happens when Parylene is layered over devices.

5. 5.

   Design a microfluidic device using PDMS. Discuss the steps you would take and the properties of PDMS that justify its use.

   Hint

   Think about PDMS's physical characteristics when choosing materials.

6. 6.

   Critically analyze the impact of SU-8's properties on the fabrication of a MEMS accelerometer. What challenges might one face?

   Hint

   Consider how material properties influence processing techniques.